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Speakers Biographies
| VP & COO Advanced Technology SEMATECH |
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Optical lithography extensibility, its impact on mask, wafer processiong, and Cost Of Ownership |
Before taking up the current position as VP & COO Advanced Technology at SEMATECH, Giang Dao, an Intel assignee, served as Director of Lithography Division of SEMATECH. Dao graduated from Tokyo Institute of Technology with a Master's Degree. He holds numerous patents in lithography, has been invited speaker and panelist at various international conferences and published numerous papers. Dao served as co-chair and chair of BACUS Symposia in 2000 and 2001 respectively. |
| Burn Lin |
Director TSMC |
Optical lithography extensibility, its impact on mask, wafer processiong, and Cost Of Ownership |
Burn J. Lin is a senior director at tsmc, Inc. He has been the president of Linnovation, Inc. since 1992. Prior to that, he held various technical and managerial positions in the field of microlitholgraphy at IBM. He has been extending the limit of optical lithography for more than one third century. Dr. Lin is the editor in chief of the Journal of Microlithography, Microfabrication, and Microsystems, a fellow of IEEE and of SPIE. He was nominated Outstanding Engineer in Taiwan in 2002. Together with 5 other colleagues lead by senior VP Shang-yi Chiang won the 2003 Outstanding Scientific and Technological Worker Award from the Executive Yuan of the Republic of China . In 2004, he won the first Frits Zernike award from SPIE, an outstanding innovation award from TSMC, and the Pan Wen-Yuan Foundation Outstanding Research Award. |
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